Magnetron Sputter Epitaxy of GaN

Magnetron Sputter Epitaxy of GaN Epilayers and Nanorods

Structural properties of Cu2O epitaxial films grown on c-axis single crystal ZnO by magnetron sputtering

Metastable ScAlN and YAlN Thin Films Grown by Reactive Magnetron Sputter Epitaxy

Cubic Sc1-xAlxN solid solution thin films deposited by reactive magnetron sputter epitaxy onto ScN(111)

Synthesis of carbon nitride films at low temperatures

Related Articles Low-temperature oriented growth of vanadium dioxide films on CoCrTa metal template on Si and vertical metal–insulator transition J. Vac. Sci. Technol. A 30, 051502 (2012) Phase formation and film morphology of ultrathin Co1−xNixSi2 films J. Vac. Sci. Technol. A 30, 050602 (2012) Magnetron-sputter epitaxy of β-FeSi2(220)/Si(111) and β-FeSi2(431)/Si(001) thin films at elevated te...